Vol. 11, No.1, pp.87-91 (2017)
Basic Study of Fine Particle Transfer Using Electrostatic Force Generated by a Microplasma Actuator Type Electrode
K. Shimizu1,2,3, A. Ito1, M. Blajan2, J. Kristof3, and H. Yoneda4
1Graduate School of Integrated Science and Technology, Shizuoka University, Japan
2Organization for Innovation and Social Collaboration, Shizuoka University, Japan
3Graduate School of Science and Technology, Shizuoka University, Japan
4Institute for Laser Science, The University of Electro-Communications, Japan
Abstract
Fine particle control has been applied in many fields such as semiconductor manufacturing, indoor environment, and so on. In this study we investigated the fine particle transfer using microplasma actuator type electrode. Microplasma can be generated at around 1 kV due to the thin dielectric with the thickness of 25 μm. 50 μm SiO2 particles were used as target particles and their movement was observed when the frequency of the applied voltage was changed from 10 Hz to 10 kHz. It was found that removal rate decreased as the frequency of the applied voltage increased, while transfer rate took the maximum value. Especially, 85% SiO2 particles were transferred to one direction by applying AC voltage with 1 kV and 500 Hz to the electrode. Removal rate was also evaluated as well as transfer rate. It was found that they had different frequency characteristics.
Keywords - Microplasma, dielectric barrier discharge (DBD), plasma actuator, particle transfer