Study on Surface Treatment of Polymer Film at Low Discharge Voltage by Pulsed Microplasma
K. Shimizu, A. Umeda, S. Muramatsu, and M. Blajan
Innovation and Joint Research Center, Shizuoka University, Japan
Abstract— Surface treatment of polyethylene naphthalate (PEN) film by pulsed atmospheric microplasma with argon gas was experimentally investigated. A Marx generator with MOSFET switches which generates negative pulses was used for generating microplasma. Hydorophilization was confirmed measuring contact angle before and after the microplasma surface treatment with argon gas. Initial contact angle was about 73°. The minimum contact angle was obtained after 30 seconds treatment, discharge voltage of -1.3 kV negative pulse, frequency of 24 kHz. The emission spectra of microplasma discharge with Ar in atmospheric pressure were measured by an ICCD camera, a spectrometer and a photomultiplier tube. Emission spectrum of microplasma discharge showed ArI peaks, OH peaks, N2 second positive band system peaks (N2 SPS) and N2 first positive band system peaks (N2 FPS). Analysis by X-ray Photoelectron Spectroscopy (XPS) showed that decrease of C-H bond and an increase of O=C bond and O-H bond.
Keywords—Microplasma, dielectric barrier discharge, polymer film