Vol. 50, No. 1（論文特集: 2025年度静電気学会全国大会）

論文

高電位静電気力顕微鏡を用いた表面電位計測における静電シールドの外乱電界抑制効果
Effectiveness of Electrostatic Shield in Reducing External Field Interference During Surface Potential Measurements Using High Voltage Electrostatic Force Microscopy

有泉　龍馬，中川　活二，上原　利夫，岸本　幸樹，塩田　裕基，武藤　浩隆，芦澤　好人
Ryuma ARIIZUMI, Katsuji NAKAGAWA, Toshio UEHARA, Koki KISHIMOTO, Hiroki SHIOTA, Hirotaka MUTO and Yoshito ASHIZAWA

静電気学会誌　第50巻　第1号　pp. 8 - 13
2025年9月11日受付
2025年11月19日受理
DOI   https://doi.org/10.34342/iesj.2026.50.1.8

Abstract
A cantilever holder incorporating an additional electrostatic shield was developed to mitigate external electrostatic interference acting on the cantilever from surrounding electric fields, which can significantly affect the accuracy of surface potential measurements in high voltage electrostatic force microscopy. By positioning the electrostatic shield at the front end of the holder, measurement errors caused by unwanted electric fields were reduced by 98.1% compared with those obtained using a conventional holder. Finite element method analysis demonstrated that the electric field on the upper surface of the cantilever decreased by 94.4%, while the torque ratio, corresponding to the signal-to-noise ratio, was suppressed by 98.2%. These analytical results are in strong agreement with the experimental findings, confirming the effectiveness of the electrostatic shielding approach.

Keywords
高電位静電気力顕微鏡，表面電位計測，静電シールド，静電界解析，有限要素法